eH Linear
The scalable eH Linear product line is designed for inline and roll-to-roll coating applications. KRI’s modular approach allows for optimizing uniformity across large areas. The robust end-hall product line increases the mean time between maintenance.
- Dimensions: Tailored to application
- Discharge Voltage: 50-300V
- Discharge Current: Dependant on application
- Operating Gases: Ar, Xe, Kr, O2, N2, Organic Precursors
Features & Benefits
- Removable Anode Assembly
- Ease of maintenance
- Minimizes down-time during maintenance
- Plug & play spare anode
- Broad-Beam High Discharge Current
- Uniform etch rates
- High etch rate
- High ion assist deposition (IAD) rates
- Versatile
- Load lock/Ultra High Vacuum (UHV) compatible
- Small footprint
- Cost Efficient
- Lower cost per mA/cm2 than gridded sources
- Low maintenance cost
- Efficient plasma conversion and stable power control
Applications
- IAD
- Load lock preclean
- In-situ preclean
- Low-energy etching
- III-V Semiconductors
- Polymer Substrates