Learn more about this product by dragging and rotating this 360°

The scalable eH Linear product line is designed for inline and roll-to-roll coating applications. KRI’s modular approach allows for optimizing uniformity across large areas. The robust end-hall product line increases the mean time between maintenance.

  • Dimensions:  Tailored to application
  • Discharge Voltage: 50-300V
  • Discharge Current: Dependant on application
  • Operating Gases:  Ar, Xe, Kr, O2, N2, Organic Precursors

Features & Benefits

  • Removable Anode Assembly
    • Ease of maintenance
    • Minimizes down-time during maintenance
    • Plug & play spare anode
  • Broad-Beam High Discharge Current
    • Uniform etch rates
    • High etch rate
    • High ion assist deposition (IAD) rates
  • Versatile
    • Load lock/Ultra High Vacuum (UHV) compatible
    • Small footprint
  • Cost Efficient
    • Lower cost per mA/cm2 than gridded sources
    • Low maintenance cost
  • Efficient plasma conversion and stable power control


  • IAD
  • Load lock preclean
  • In-situ preclean
  • Low-energy etching
  • III-V Semiconductors
  • Polymer Substrates