eH Linear

The scalable eH Linear product line is designed for inline and roll-to-roll coating applications. KRI’s modular approach allows for optimizing uniformity across large areas. The robust end-hall product line increases the mean time between maintenance.

  • Dimensions:  Tailored to application

  • Discharge Voltage: 50-300V

  • Discharge Current: Dependant on application

  • Operating Gases: Ar, Xe, Kr, O2, N2, Organic Precursors

Features & Benefits

  • Removable Anode Assembly

    • Ease of maintenance

    • Minimizes down-time during maintenance
    • Plug-and-play spare anode

  • Broad-Beam High Discharge Current

    • Uniform etch rates

    • High etch rate
    • High ion assist deposition (IAD)rates

  • Versatile

    • Load lock/Ultra High Vacuum (UHV) compatible

    • Small footprint

  • Cost Efficient

    • Lower cost per mA/cm2 than gridded sources

    • Low maintenance cost

  • Efficient plasma conversion and stable power control

Applications

  • IAD

  • Load lock preclean

  • In-situ preclean

  • Low-energy etching

  • Polymer Substrates

Start the Process

Our Gridless End-Hall eH Sources

Contact Us

If you have questions about any of our products or their applications, please contact us. We look forward to hearing from you.

Send us A QUESTION
Find a Representative