KRI Products provide stable performance and exceptional reliability, and they are compatible with a wide variety of processes.

KRI is a leader in the manufacture of broad-beam products, including commercial ion sources, plasma sources, and power supplies.

At KRI, we design and manufacture
technology enabling products.

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We are KRI
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At KRI, we design and manufacture technology-enabling products.

KRI is a leader in the manufacture of broad-beam products, including commercial ion sources, plasma sources, and power supplies.

KRI Products provide stable performance and exceptional reliability, and they are compatible with a wide variety of processes.

Our Product Lines

KRI products are vacuum-based process tools which interact with materials at the atomic level.

The Kaufman ion source is a plasma-generation device that has enabled vacuum process engineers and scientists to leverage ion-beam processing of materials in a variety of ways. For example, adoption of the Kaufman source has led to many breakthroughs that are now commonly understood benefits for advanced material processing, including:

Densification of thin films

Densification of smooth multilayer film stacks

Activation of polymer surfaces

Plasma-etching of hard, chemically inert materials

Learn about how our products are applied in many common processes.

Precision Thin-
Film Control

Etch Uniformities &
Critical Dimensions

Precision Optics

Consumer Eyewear

Photonics & Lasers

Medical Devices

Magnetic Data
Storage

MEMS, Sensors,
Displays

Semiconductors

Precision Thin-
Film Control

Etch Uniformities &
Critical Dimensions

Precision Optics

Consumer Eyewear

Photonics & Lasers

Medical Devices

Magnetic Data
Storage

MEMS, Sensors,
Displays

Semiconductors

Power Supplies

KRI power supplies operate on various ion, plasma, and electron sources. We understand the tough environments in which our power supplies are required to work. These products are specialized to output stable and repeatable power to the dynamic loads used in plasma processing.

Trusted and Reliable

Companies depend on KRI technology when high-purity material process is the objective. Our solutions enable the fabrication of structures with critical dimensions ranging from the micrometer to sub-nanometer scale. Capable of extremely high precision, the products are engaged in creating material systems and surface features with atomic-level control.