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If you have any questions regarding our Product, please reach out to sales for technical consulting.

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1330 Blue Spruce Drive
Fort Collins, Colorado 80524

(970) 495-0187

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Select ion source*

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Please explain the issue

Before uploading files*

Show controller front panels before enabling (auto controller in standby) so we can see setpoints before enabling.

For RF ion sources, be sure to include the RF generator and show the entire front panel. Before recording, switch the RF controller to show operating frequency by pressing the button below PGM in the display.

Enable the source and show operation until the failure or incorrect operation occurs and any help messages that are displayed.

Describe the failure and any preceding chamber events or observations.

Did this occur after a maintenance event or a vent?

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If the equipment has been operating successfully

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Contact Us

Trusted and Reliable

1330 Blue Spruce Drive Fort Collins, Colorado 80524

(970) 495-0187

Have a question? We have answers.

1330 Blue Spruce Drive
Fort Collins, Colorado 80524