Gridded RFICP Sources

The RFICP products produce a high density discharge without the use of filaments. The beam extracted from the discharge is precisely controlled to provide a defined shape, current density, and ion energy.

Kaufman & Robinson offers a complete product line of radio frequency, inductively coupled plasma (RFICP) gridded ion source products. The RFICP’s can be configured and integrated into numerous vacuum process platforms, including bell jar systems, small multi-purpose R&D systems, planetary deposition systems, etching systems, box coaters, single wafer load-lock cluster tools, sputtering systems, and in-line coating systems.

The RFICP products come in a comprehensive product package. The package is complete with components required to install and operate the RFICP products, including the RF inductively coupled RFICP ion source, application-specific ion optics, electron source neutralizer, power supply controller, vacuum feedthroughs, and cables.

Our RFICP products are used across the globe in world class research and industrial fabrication of optical, photonic, magnetic, and microelectronic devices. The RFICP products are applied in standard and emerging material processes.

The ability to produce and control ion species with specific energy, chemical reactivity, current density, and ion trajectory makes the RFICP products effective tools to engineer precision films and surfaces. Whether it’s densification, optical transmission, critical thickness uniformity, smooth interfaces, improved adhesion, or vertical sidewalls, the RFICP products are responsible for yielding beneficial material properties.


Commonly, the RFICP products are applied in the following vacuum processes

  • Ion-beam-assisted deposition in thermal and e-beam evaporation (IBAD)

  • In-situ preclean in sputtering and evaporation (PC)

  • Surface modification and activation (SM)

  • Direct deposition of thin, hard, or functional coatings (DD)

  • Ion beam sputter deposition of single and multilayer structures (IBSD)

  • Ion beam etching of surface features in any material (IBE)

  • Ion beam tuning, and figuring of precision devices (IBF)

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If you have questions about any of our products or their applications, please contact us. We look forward to hearing from you.