eH Linear

The scalable eH Linear product line is designed for inline and roll-to-roll coating applications. KRI’s modular approach allows for optimizing uniformity across large areas. The robust end-hall product line increases the mean time between maintenance.

  • Dimensions:  Tailored to application

  • Discharge Voltage: 50-300V

  • Discharge Current: Dependant on application

  • Operating Gases: Ar, Xe, Kr, O2, N2, Organic Precursors

Features & Benefits

  • Removable Anode Assembly

    • Ease of maintenance

    • Minimizes down-time during maintenance
    • Plug-and-play spare anode

  • Broad-Beam High Discharge Current

    • Uniform etch rates

    • High etch rate
    • High ion assist deposition (IAD)rates

  • Versatile

    • Load lock/Ultra High Vacuum (UHV) compatible

    • Small footprint

  • Cost Efficient

    • Lower cost per mA/cm2 than gridded sources

    • Low maintenance cost

  • Efficient plasma conversion and stable power control

Applications

  • IAD

  • Load lock preclean

  • In-situ preclean

  • Low-energy etching

  • Polymer Substrates

Start the Process

Our Gridless End-Hall eH Sources

A close up of a KDC source being put together. A the pieces or organized and piled together.

Contact Us

If you have questions about any of our products or their applications, please contact us. We look forward to hearing from you.

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