Power Supplies

Our power supplies operate various ion, plasma and electron sources. These products are specialized to output stable and repeatable power to the dynamic loads used in plasma processing.
Products:  

Kaufman & Robinson understands the tough environments in which our power supplies are required to work. To ensure your success, Kaufman & Robinson has pulled together an electrical engineering team that has a superior understanding of plasmas thus allowing us to design and manufactured power supplies that will withstand the harsh environments that our products are subjected to.

KRI’s modular power supplies include but are not limited to the following:

Gridless end Hall Power Supplies:

eH200, 400, 1000, 2000, 3000, Mark I, Mark II

Modules:

Cathode
20A, 15A, 10A or 5A emission current
Soft start

Discharge
20A, 15A, 10A or 5A & 300V DC
Standard and low voltage

Auto controller
System control
Gas control – 4 MFCs
Open or closed gas loop control
Automatic Start/Stop Sequence

Selectable

Total integrated package or individual discrete modules

Protection

Arc / short management
Current & Power Limits

Remote interface

Isolated analog & RS-232

DC Gridded Power Supplies:

  • Switch mode
    • Low stored energy output
    • DC discharge power:
    • Beam
      • 0A, 1200V DC
    • Accelerator
      • 6A, 600V
    • Filament Neutralizer
      • 2A emission
    • Integrated
  • Auto controller interface
  • Selectable
  • Protection
  • Arc / short management
  • Current & Power Limits
  • Remote interface
  • Isolated analog & RS-232

RFICP Gridded Power Supplies:

Switch mode:

Low stored energy output

RF discharge power: 1 & 2kW
2 MHz

Beam
1.0A & 2.0A, 1200V DC

Accelerator
1.0A & 2.0A, 1200V

Neutralizer options
2A emission

Auto controller interface

Selectable

Total integrated package or individual discrete modules

Protection

Arc / short management
Current & Power Limits

Remote interface

Isolated analog & RS-232

Please contact Kaufman & Robinson with any of your power supply needs and we will be happy to review your project to see if we can supply a power supply for your project.

Product