Kaufman & Robinson engineers and manufactures broad beam ion and plasma products. Our products are vacuum-based process tools which interact with materials at the atomic level. Typical material processes include the precision deposition of thin films, remote plasma etching of patterned wafers, and nanometer-scale modification of surfaces. We are respected across the globe for innovative designs, product quality and technical expertise. Our products incorporate technical features such as gridded or gridless sources, DC or RF discharges and automated power supply controllers.
Applications of Broad Beam Ion Sources Book Cover