Hollow Cathode Neutralizers
Hollow Cathode is one of several types of low energy and high current electron sources KRI offers. Neutralizer sources are typically applied as neutralizers or cathodes in the controlled production of ion and plasma beams. Commonly, they are integrated as neutralizers onto ion beam sources or they may be integrated into the ionization process of a plasma discharge. In other, more specialized applications, they can be installed with magnetron cathodes to modify the sputtering operation. Each Hollow Cathode Neutralizer has these characteristics:
SHC1000
MHC1000
The MHC1000 is typically used with the EH200/400.
LHC1000
The LHC1000 is used with the EH1000/2000/3000/5000.
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