Hollow Cathode Neutralizers

Hollow Cathode is one of several types of low energy and high current electron sources KRI offers. Neutralizer sources are typically applied as neutralizers or cathodes in the controlled production of ion and plasma beams. Commonly, they are integrated as neutralizers onto ion beam sources or they may be integrated into the ionization process of a plasma discharge. In other, more specialized applications, they can be installed with magnetron cathodes to modify the sputtering operation. Each Hollow Cathode Neutralizer has these characteristics:

  • Easy Installation

  • Operates in inert and reactive gas environments

  • Effective space charge neutralization of the ion source beam

  • Enhanced electron flux in magnetron sputtering

SHC1000-Large-photo-to-come

SHC1000

MHC1000-Large

MHC1000

The MHC1000 is typically used with the EH200/400.

LHC1000-Large

LHC1000

The LHC1000 is used with the EH1000/2000/3000/5000.

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If you have questions about any of our products or their applications, please contact us. We look forward to hearing from you.