RFICP380
The RFICP380 is the most powerful gridded ion source offered by KRI which is well suited for 300mm applications with optimized uniformity.
The RFICP380 can also be used in large area ion-assisted applications. Under the standard configuration, the typical ion energy range is from 100 to 1500eV, with ion current output up to 4000mA.
Our Gridded RFICP Sources
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If you have questions about any of our products or their applications, please contact us. We look forward to hearing from you.