Sidewinder
| Product | Sidewinder |
|---|---|
| Configurations | |
| - Process Gases | Inert, Reactive, Blends |
| - Process (Common) | Pre-Cleaning, Surface Modification, Ion Beam Assisted Deposition, Direct Deposition, Ion Beam Etch, Ion Beam Sputter Deposition |
| - Process (Typical) | end-Hall, Gridded |
| - Source Gas | N/A |
| - Emission Structure | Space Charge Limited |
| - Regulation | Emission Current |
| - Coupling | Immersed |