RFICP40

The RFICP40 is the smallest and most cost-effective RF gridded ion source product. It is well suited for installations in smaller vacuum platforms. At an attractive cost, the RFICP40 product brings the latest gridded technology innovations to research and develop applications. The research scientist can have access to filament-less technology which makes the RFICP40 a productive tool when the use of reactive gases are a dominant variable in the process strategy. Under the standard configuration, the typical ion energy range is from 100 to 1200eV, while the ion current can exceed 120mA.