LHC 1000
Models:
- LHC 1000
Product | LHC 1000 |
---|---|
Configurations | |
- Process Gases | Inert, Reactive, Blends |
- Typical Installation Distance | end-Hall, Anode Layer, Gridded |
- Process (Common) | Pre-Cleaning, Surface Modification, Ion Beam Assisted Deposition, Direct Deposition, Ion Beam Etch, Ion Beam Sputter Deposition |
- Source Gas | Inert (Ar, Xe) |
- Emission Structure | Plasma Bridge |
- Regulation | Emission Current |
- Coupling | Non-Immersed |