LHC 1000

Models:

  • LHC 1000
ProductLHC 1000
Configurations
- Process GasesInert, Reactive, Blends
- Typical Installation Distanceend-Hall, Anode Layer, Gridded
- Process (Common)Pre-Cleaning, Surface Modification, Ion Beam Assisted Deposition, Direct Deposition, Ion Beam Etch, Ion Beam Sputter Deposition
- Source GasInert (Ar, Xe)
- Emission StructurePlasma Bridge
- RegulationEmission Current
- CouplingNon-Immersed