eH1000
The efficient gas utilizing eH1000 is ideally suited to provide cost-effective, high-current ion beams for medium sized vacuum systems. It is commonly used for ion assist, precleaning, and low energy etching.
- Dimensions: diameter = 5.7" height = 5.5"
- Discharge Voltage/Current: 50-300V/10A
- Operating Gases: Ar, Xe, Kr, O2, N2, Organic Precursors
Features & Benefits
- Removable Anode Assembly
- Ease of maintenance
- Minimizes down-time during maintenance
- Plug-and-play spare anode
- Broad-Beam High Discharge Current
- Uniform etch rates
- High etch rate
- High ion assist deposition (IAD) rates
- High current densities
- Versatile
- Load lock/Ultra High Vacuum (UHV) compatible
- Easy installation
- Radiant cooled (no water cooling required)
- Cost Efficient
- Lower cost per mA/cm2 than gridded sources
- Low maintenance cost
- Efficient plasma conversion and stable power control
Applications
- IAD
- Load lock preclean
- In-situ preclean
- Direct Deposition
- Surface Modification
- Low-energy etching
- III-V Semiconductors
- Polymer Substrates